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PublicationsCo-supervised PhD students co-authors of publications are mentioned in bold fond Books
Philippe Basset, Elena Blokhina and Dimitri Galayko. Electrostatic kinetic energy harvesting. Wiley-ISTE, 2016, 214 pages, ISBN: 978-1-84821-716-4 Elena Blokhina, Abdelali El Aroudi, Eduard Alarcon, and Dimitri Galayko (Eds.). (2016). Nonlinearity in Energy Harvesting Systems: Micro-and Nanoscale Applications. Springer, ISBN 978-3-319-20355-3
JournalsSeries-Parallel Charge Pump Conditioning Circuits for Electrostatic Kinetic Energy Harvesting, A. Karami, D. Galayko, P. Basset, IEEE Transactions on Circuits and Systems I: Regular Papers. 2016 Oct 12. A batch-fabricated electret-biased wideband MEMS vibration energy harvester with frequency-up conversion behavior powering a UHF wireless sensor node, Y. Lu, E. O’Riordan, F. Cottone, S. Boisseau, D. Galayko, E. Blokhina, F. Marty, P. Basset, Journal of Micromechanics and Microengineering. 2016 Sep 29;26(12):124004. « Complete Electromechanical Analysis of Electrostatic Kinetic Energy Harvesters biased with a Continuous Bias Voltage », E. O'Riordan, E. Blokhina; P. Basset and D. Galayko, Sensors & Actuators: A. Physical « A large bandwidth MEMS electret-based vibration energy harvester powering a UHF wireless sensor node », Y. Lu, E. O’Riordan, F. Cottone, S. Boisseau, D. Galayko, E. Blokhina, F. Marty, and P. Basset, Journal of Micromechanics and Microengineering "A Nonlinear MEMS Electrostatic Kinetic Energy Harvester for Human-Powered Biomedical Devices", Y. Lu, F. Cottone, S. Boisseau, F. Marty, D. Galayko, P. Basset, Applied Physics Letters 107, 253902 (2015) "Capacitive Energy Conversion with Circuits Implementing a Rectangular Charge-Voltage Cycle. Part 1: Analysis of the Electrical Domain." D. Galayko, A. Dudka, A. Karami, E. O’Riordan, E. Blokhina, O. Feely and P. Basset, submitted to IEEE Transactions on Circuits On System, Vol. 62, No. 9, September 2015 "Capacitive Energy Conversion with Circuits Implementing a Rectangular Charge-Voltage Cycle. Part 2: Electromechanical and Nonlinear Analysis." E. O’Riordan, A. Dudka, D. Galayko, P. Basset, O. Feely and Elena Blokhina, IEEE Transactions on Circuits On System, Vol. 62, No. 9, September 2015 " Electret-Free Micromachined Silicon Electrostatic Vibration Energy Harvester With the Bennet’s Doubler as Conditioning Circuit", V. Dorzhiev, A. Karami, Basset, P. ; Marty, F. ; Dragunov, V. ; Galayko, D., IEEE Electron Device Letters, Volume:36 , Issue: 2, pp. 183 - 185 "Sliding in a piecewise-smooth dynamical system with a hold-on effect", E. Blokhina, D. Galayko, D. Fournier-Prunaret, O. Feely, Physics Letters A, 378 :3085-3092, 2014 "Electrostatic Vibration Energy Harvesters with Linear and Nonlinear Resonators", P. Harte, E. Blokhina, O. Feely, D. Fournier-Prunaret, D. Galayko, International Journal of Bifurcation and Chaos, 24(11), 2014 "Electrostatic vibration energy harvester with combined effect of electrical non-linearities and mechanical impact", P. Basset, D. Galayko, F. Cottone, R. Guillemet, E. Blokhina, F. MArty and T. Bourouina, accepted for publishing in Journal of Micromechanics and Microengineering, 2014, vol. 24, no3, [Note(s): 035001.1-035001.14] "Steady-State Oscillations in Electrostatic Vibration Energy Harvesters", E. Blokhina, D. Galayko, P. Basset, O. Feely, IEEE Transactions on Circuits and Systems I, vol. 60, issue 4, april 2013, pp. 875 - 884 "Design optimization of an out-of-plane gap-closing electrostatic vibration energy harvester (VEH) with a limitation on the output voltage", R. Guillemet, P. Basset, D. Galayko and T. Bourouina, Analog Integrated Circuits and Signal Processing Journal, April 2012, Volume 71, Issue 1, pp 39-47 "Synchronization Analysis of Networks of Self-Sampled Al-Digital Phase-Locked Loops", J.-M. N. Akre, J. Juillard, D. Galayko, E. Colinet, IEEE Transactions on Circuits and Systems I, vol. 59, issue 4 pp. 708-720, april 2012 "Energy harvesting Circuit Using Variable Capacitor with Higher Performance", H. Florentino, D. Galayko, R. Freire, B. Luciano, C. Florentino, Journal of Integrated Circuits and Systems, vol. 6, n. 1, march 2011, pp. 68-74 "A general analytical tool for the design of Vibration Energy Harvesters (VEH) based on the mechanical impedance concept", D. Galayko and P. Basset, IEEE Transactions on Circuits and System I: Regular Papers, Vol. 58, no. 2, february 2011, pp. 299-311 "A batch-fabricated and electret-free silicon electrostatic vibration energy harvester", P. Basset, D. Galayko, A. Mahmood Paracha, F. Marty, A. Dudka and T. Bourouina, Journal of Micromechanics and Microengineering, vol. 19, num. 11, 2009, 115025 (12pp) "A silicon MEMS DC/DC converter for autonomous vibration-to-electrical energy scavenger", A.Mahmood Paracha, P. Basset, D. Galayko, F. Marty and T. Bourouina, IEEE Electronic Device Letters, May 2009, vol. 30, num. 5, pp. 481-483 "Coupled-resonator micromechanical filters with voltage tunable bandpass characteristic in thick-film polysilicon technology", D. Galayko, A. Kaiser, B. Legrand, L. Buchaillot, D. Collard and C. Combi, Sensors and Actuators A: Physical, Volume 126, Issue I, 26 january 2006, pp. 227-240. "Tunable passband T-filter with electrostatically-driven polysilicon micromechanical resonators" D. Galayko, A. Kaiser, B. Legrand, L. Buchaillot, D. Collard and C. Combi, Sensors and Actuators A: Physical, Volume 117, Issue 1, 3 january 2005, pp. 115-120. "Design, realisation and test of micro-mechanical resonators in thick-film silicon technology with postprocess electrode-to-resonator gap reduction", D. Galayko, A Kaiser, L. Buchaillot, B. Legrand, D. Collard, C. Combi, Journal of Micromechanics and Microengineering, N. 13 (2003) 1-7, Institute of Physics Publishing. "Design Methods for Micro-Electro-Mechanical Bandpass Filters with Transmission Zeros", D. Galayko, A. Kaiser,Journal on Analog Integrated Circuits for Signal processing, vol. 32, N. 1, Juillet 2002, pp. 17-28, Kluwer Academic Publisher. Conferences"Low-frequency and ultra-wideband MEMS electrostatic vibration energy harvester powering an autonomous wireless temperature sensor node.", Yingxian Lu, Francesco Cottone, Sébastien Boisseau, Frédéric Marty, Dimtiri Galayko and Philippe Basset, IEEE MEMS Conference, Shanghai, China, January 2016 "Low-Frequency MEMS Electrostatic Vibration Energy Harvester With Corona-Charged Vertical Electrets and Nonlinear Stoppers", Yingxian Lu, Francesco Cottone, Sébastien Boisseau, Dimitri Galayko, Frédéric Marty, Philippe Basset, in PowerMEMS 2015 conference proceeding, Boston, MA, USA, December 2015 (Invited) "A distributed synchronization of all-digital PLLs network for clock generation in synchronous SOCs", C. Shan, E. Zianbetov, D. Galayko, F. Anceau, Olivier Billoint et D. Galayko, NewCAS 2015 conference, Grenoble, France, June 2015 "The limiting effect of the electromechanical coupling in self-biased electrostatic vibration energy harvester", P. Basset, A. Karami, Dimitri Galayko, Frederic MARTY, Design, Test, Integration & Packaging of MEMS/MOEMS, Montpellier, avril 2015 "Understanding Complexity in Multiphysics Systems-on-a-Chip: Modern Approaches for Design", E. Blokhina, D. O’Connell, D. Andrade-Miceli, S. Gorreta-Marine, J. Pons-Nin, M. Dominguez-Pumar, O. Feely and D. Galayko, in. Proc. of IEEE International Symposium on Circuits and Systems (ISCAS) 2015, 24-27 May 2015, Lisbon, Portugal. “Universal Nonlinear Phenomena in a Class of Electronic Oscillators”, P. Harte, E. O’Riordan, E. Blokhina, O. Feely and D. Galayko, in. Proc. of IEEE International Symposium on Circuits and Systems (ISCAS) 2015, 24-27 May 2015, Lisbon, Portugal. "Reliable AMS simulations of electrostatic vibration energy harvesters: a case study", F. Bizzarri, E. Blokhina, A. Brambilla and D. Galayko, in proc. of IEEE International Symposium on Fundamentals of Electrical Engineering (ISFEE) 2014, 28-29 November 2014, Bucharest, Romania. "A Technique for the Analysis of Discontinuity Induced Behaviour in Piecewise-Smooth Electronic Oscillators", P. B. Harte, E. Blokhina, D. Galayko and O. Feely, in Proceeding of 2014 International Simposium on Nonlinear Theory and Application, Luzern, Switzerland, sept. 2014
"Wideband Electrostatic Vibration Energy Harvester (e-VEH) having a low start-up voltage employing a high-voltage integrated interface", A. Dudka, P. Basset, F. Cottone, E. Blokhina and D. Galayko, PowerMEMS 2013 Workshop, december 2013, pp. 612-616 "Tools for Analytical and Numerical Analysis of Electrostatic Vibration Energy Harvesters: Application to a Continuous Mode Conditioning Circuit", E. Blokhina, P. Basset, F. Cottone, A. Dudka, D. Galayko and Orla Feely, Accepted at PowerMEMS 2013 Workshop, december 2013, pp. 361-365 "Distributed clock generator for synchronous SoC using ADPLL network" E. Zianbetov, D. Galayko, F. Anceau, M. Javidan, C. Shan, O. Billoint, A. Korniienko, E. Colinet, G. Scorletti, J. M. Akre, J. Juillard, IEEE Custom Integrated Circuits Conference, 2013, San José, CA "FPGA Prototyping of Large Reconfigurable ADPLL Network for Distributed Clock Generation", C. Shan, D. Galayko, F. Anceau, International Conference on ReConFigurable Computing and FPGAs (ReConFig), decembre 2013, Mexico "Non-linear MEMS electrostatic kinetic energy harvesters with a tunable multistablepotential for stochastic vibrations", F. Cottone, P. Basset, R. Guillemet, D. Galayko, F. Marty and T. Bourouina, accepted for Transducers 2013 & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems "Nonlinear effects in electrostatic vibration energy harvesters: Current progress and perspectives." D. Galayko and E. Blokhina, Circuits and Systems (ISCAS), 2013 IEEE International Symposium on. IEEE, 2013. "Combined mechanical and circuit nonlinearities in electrostatic vibration energy harvesters", E. Blokhina, D. Fournier-Prunaret, P. Harte, D. Galayko, O. Feely, In Circuits and Systems (ISCAS), 2013 IEEE International Symposium on (pp. 2739-2742). "IC design of an adaptive high-voltage electrostatic vibration energy harvester", A. Dudka, D. Galayko, P. Basset, Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 Symposium on, April 2013, Barcelona, Spain "Wideband MEMS electrostatic vibration energy harvesters based on gap-closing interdigited combs with a trapezoidal crossection", R. Guillemet, P. Basset, D. Galayko, F. Cottone, F. Marty and T. Bourouina, IEEE MEMS 2013 conference, january 2013, Taipei, Thaiwan, january 2013 "Bistable multiple-mass electrostatic generator for low frequency vibration energy harvesting", F. Cottone, P. Basset, R. Guillemet, D. Galayko, F. Marty and T. Bourouina, IEEE MEMS 2013 conference, january 2013, Taipei, Thaiwan, january 2012 "Bifurcation Scenarios in Electrostatic Vibration Energy Harvesters", E. O'Riordan, P. Harte, E. Blokhina, D. Galayko, O. Feely, Nonlinear Dynamics of Electronic Systems, proceeding of NDES 2012 conference, Wolfenbüttel, Germany, pp. 34-37 http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=6289518 "Design and modeling of ADPLL with sliding-window for wide range requency tracking", C. Shan, F. Anceau et D. Galayko, IEEE NEWCAS2012 international conference, june 2012, Montreal, Canada "Bifurcation Scenarios in Electrostatic Vibration Energy Harvesters", E. O'Riordan, P. Harte, E. Blokhina, D. Galayko and O. Feely, Int. Conf. on Nonlinear Dynamics of Electronic Systems, 2012 "FPGA Implementation of Reconfigurable ADPLL Network for Distributed Clock Generation", C. Shan, E. Zianbetov, M. Javidan, F. Anceau, M. Terosiet, S. Féruglio, D. Galayko, O. Romain, É. Colinet, J. Juillard, accepted in 2011 International Conference on Field Programmable Technology, december 2011, New Dely, India "An Analytical Model Of The Oscillation Period For Tri-State Inverter Based DCO", M. Terosiet, S. Féruglio, D. Galayko, P. Garda, IEEE International Conference on Microelectronics (ICM), december 2011, Hammamet, Tunisie "A Design Approah for Networks of self-Sampled All-Digital Phase-Locked Loops", J.M. Akré, J. Juillard, M. Javidan, E. Zianbetov, D. galayko, A. Korniienko, E. Colinet, 20th European Conference on Circuit theory and Design (ECCTD'11),pp. 795-798, Linköping, Sweden, August 29-31, 2011 "Novel technique to reduce the metastability of bang-bang phase-frequency detector", M. Javidan, E. Zianbetov, F. Anceau, D. Galayko, E. Colinet and J. Juillard, IEEE International Symposium on Circuits and Systems ISCAS2011, may 2011, Rio de Janeiro, Brazil "All-digital PLL array provides reliable distributed clock for SOCs", M. Javidan, E. Zianbetov, F. Anceau, D. Galayko, E. Colinet, A. Korniienko and J. Juillard, IEEE International Symposium on Circuits and Systems ISCAS2011, may 2011, Rio de Janeiro, Brazil "A 2 GHz CMOS DCO with optimized architecture for high speed clocking", E. Zianbetov, M. Javidan, F. Anceau, D. Galayko, E. Colinet and J. Juillard, IEEE International Symposium on Circuits and Systems ISCAS2011, may 2011, Rio de Janeiro, Brazil "Electrostatic vibration energy harvester with piezoelectric start-up generator", H. R. Florentino, R. Freire, A. V. S. Sa, C. Florentino and D. Galayko, in: Circuits and Systems (ISCAS), 2011 IEEE International Symposium on, IEEE, pages 1343--1346, 2011 "Design and Modeling of a Successive Approximation ADC for the Electrostatic Harvester of Vibration Energy", Raouf Khalil, Andrii Dudka, Dimitri Galayko, Ramy Iskander and Philippe Basset, Accepted at the IEEE International Behavioral Modeling and Simulation Conference, September 2010, San José, USA (CA) "Control Law Synthesis for Distributed Multi-Agent Systems: Applications to Active Clock Distribution Network", A. Korniienko, G. Scorletti, E. Colinet, E. Blanco, J. Juillard and D. Galayko, Automatic and Control Conference (ACC 2010), San Francisco, CA, 2010 "High-voltage low power analogue-to-digital conversion for adaptive architectures of capacitive vibration energy harvesters", R. Khalil1, A. Dudka, D. Galayko and P. Basset, the 10th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications POWERMEMS 2010, Leuven, Belgium "Design and VHDL Modeling of All-Digital PLLs", E. Zianbetov, M. Javidan, F. Anceau, D. Galayko, E. Colinet and J. Juillard, 8th IEEE International NEWCAS Conference (NEWCAS'10), Montreal, Canada, June 20-23, 2010 "Determination of the Behaviour of Self-Sampled Digital Phase-Locked Loops", J-M. Akré, J. Juillard, S. Olaru, D. Galayko, E. Colinet, 53rd IEEE International Midwest Symposium on Circuits and Systems (MWSCAS’10), pp. 1089-1092, Seattle, Washington (USA), August 1-4, 2010 "Design and VHDL Modeling of All-Digital PLLs", E. Zianbetov, M. Javidan, F. Anceau, D. Galayko, E. Colinet, J. Juillard, 8th IEEE International NEWCAS Conference (NEWCAS’10), pp. 293-296, Montreal, Canada, June 20-23, 2010 "Combined optimization of electrical and mechanical parameters of an out-of-plane gap-closing electrostatic Vibration Energy Harvester (VEH)", R. Guillemet, P. Basset, D. Galayko and T. Bourouina, Proceeding of the 12th symposium on Design, Test, Integration and Packaging Conference (DTIP’10), Sevilla, Spain, 2010 "A clock network of distributed ADPLLs using an asymmetric comparison strategy", A. Korniienko, E. Colinet, G. Scorletti, E. Blanco, D. Galayko and J. Juillard International Symphosium on Circuits and System (ISCAS), april 2010, pp. 3212-3215 "MEMS DC/DC converter for 1D and 2D vibration-to-electricity power conversion", A. Mahmood Paracha, P. Basset, D. Galayko, Adrei Dudka, F. Marty and T. Bourouina, Proceeding of the 15th int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers’09), Denvers, USA, 2009 "VHDL-AMS modeling of adaptive electrostatic harvester of vibration energy with dual-output DC-DC converter", Andrii Dudka, Dimitri Galayko and Philippe Basset, Proceeding of the 2009 IEEE International Behavioral Modeling and Simulation Conference (BMAS'2009)San José, USA, 2009 "A bidirectional vibration powered electric energy generator based on an electrostatic transduction using an in-plane overlap plate (IPOP) mechanism", Ayyaz Mahmood Paracha, Philippe Basset, Frédéric Marty, Tarik Bourouina, Dimitri Galayko, Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP''2009), Rome, Italy, April 2009 "Modelling techniques for capacitive harvesters of vibration energy", Galayko Dimitri, Caluwaerts Ken, Basset Philippe, Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS'2008), Sendai, Japon, November 2008 "Characterization of a DC/DC converter using an in-plane bulk-silicon capacitive transducer for vibration-to-electricity power conversion", Mahmood Paracha Ayyaz, Basset Philippe, Galayko Dimitri, Marty Frédéric, Dudka André, Bourouina Tarik, Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS'2008), Sendai, Japon, November 2008 "Mechanical/electrical power-aware impedance matching for design of capacitive vibration energy harvesters", Galayko Dimitri, Basset Philippe, Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS2008), Sendai, Japon, November 2008 "SystemC-AMS Heterogeneous Modeling of a Capacitive Harvester of Vibration Energy", Caluwaerts Ken, Galayko Dimitri, Basset Philippe, IEEE International Behavioral Modeling and Simulation Conference (BMAS'2008), San José, CA, USA, September 2008 "Optimization and AMS Modeling for design of an electrostatic vibration energy harvester's conditioning circuit with an auto-adaptive process for external vibration changes", Galayko Dimitri, Basset Philippe, Mahmood Paracha Ayyaz, Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP''2008), Nice, France, April 2008 "SystemC-AMS modeling of an electromechanical harvester of vibration energy", Caluwaerts Ken, Galayko Dimitri, Forum on Specification & Design Languages (FDL'2008), Stuttgart, Allemagne, September 2008 "Optimization and AMS modeling of capacitive vibration harvester", Galayko Dimitri, Pizarro Rodrigo, Basset Philippe, Mahmood Paracha Ayyaz, Amendola Gilles, Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS'2007), Freiburg, Allemagne, June 2007 "Knowledge-Aware Synthesis of Analog Cells using Hierarchical Graph-Based Sizing and Biasing", Iskander Ramy, Galayko Dimitri, Louërat Marie-Minerve, Kaiser Andreas, 50th Midwest Symposium on Circuits and Systems (MWSCAS'2007), Montreal, Québéc, August 2007 "AMS modeling of controlled switch for design optimization of capacitive vibration energy harvester", Dimitri Galayko, Rodrigo Pizarro, Philippe Basset, Ayaz M. Paracha and Gilles Amendola, IEEE International Behavioral Modeling and Simulation Conference (BMAS'2007), San José, CA, USA, September 2007 "Connaissance et Optimisation pour la Synthèse Analogique", Iskander Ramy, Galayko Dimitri, Louërat Marie-Minerve, Kaiser Andreas, Premier Colloque National du GDR SOC-SIP, Paris, France, Juin 2007 "Réutilisation et migration d'amplificateurs avec CAIRO+", Dimitri Galayko, Ramy Iskander, Marie-Minerve Louërat, Alain Greiner, Cordination Nationale pour la Formation en Micro-nanoélectronique (CNFM'06), Novembre 2006, Saint-Malo, France. "Pulse-actuated micromechanical resonator using digital Kalman filtering", Eric Colinet, Dimitri Galayko, Jérôme Juillard, ICMENS2005 (International Conference on MEMS, NANO, and Smart Systems), Canada, Banff, juillet 2005. "Microelectromechanical coupled-resonator IF filters with variable bandwidth in thick-film epitaxial polysilicon technology", D. Galayko, A. Kaiser, B. Legrand, L. Buchaillot, D. Collard and C. Combi, MEMSWAVE2003, septembre 2003, Toulouse, France. "Electrostatical coupling-spring for micro-mechanical filtering applications", D. Galayko, A. Kaiser, B. Legrand, D. Collard, C. Combi, IEEE ISCAS2003 conference, Bangkok, Thailand. "Microelectromechanical Variable-Bandwidth IF Frequency Filters with Tunable Electrostatical Coupling Spring", D. Galayko, A. Kaiser, B. Legrand, D. Collard, C. Combi, IEEE MEMS2003 conference, Kyoto, Japon. "Filtres microélectromécaniques silicium à couplage électrostatique à bande passante variableet leur modèle comportemental", D. Galayko, A Kaiser, B. Legrand, D. Collard, C. Combi, TAISA2003, septembre 2003, Louvain-la-Neuve, Belgique. "Design of Clamped-Clamped Beam Resonator in Thick-Film Epitaxial Polysilicon Technology", D. Galayko, A. Kaiser, B. Legrand, D. Collard, C. Combi, ESSDERC2002, Florence, Italie. "Conception de résonateurs micromécaniques pour les filtres IF dans la technologie de couches épaisses épitaxiées", D. Galayko, A. Kaiser, TAISA2002, Paris, France. "Architecture-level center frequency drift compensation method for micro-mechanical filters used in IF stages of wireless telecommunication receivers", O. Billoint, D. Galayko, A. Kaiser, B. Legrand, DTIP2002, Cannes, France. "High-frequency high-Q micro-mechanical resonators in thick epipoly technology with post-process gap adjustment", D. Galayko, A. Kaiser, B. Legrand, D. Collard, C. Combi, IEEE MEMS2002 conference, Las Vegas, USA. "Equivalence of electrical circuits and micro-mechanical oscillating structures and its application to complex filter structures", D. Galayko, A. Kaiser, ECCTD 2001, Helsinki, Finlande. "Design methods for micro-electro-mechanical bandpass filters", D. Galayko, A. Kaiser, DTIP 2001, Cannes, France. Patents"Dispositif de génération de signaux d’horloge à comparaison asymétrique d’erreurs de phase", dépôt international N° WO2011051407 A1, Anton Korniienko, Éric Colinet, Dimitri Galayko, 2011 "Procédé de polarisation d'un micro-circuit électromécanique à une valeur de charge électrique constante", dépôt international N° WO2004107570 A1, D. Galayko, A. Kaiser, D. Collard. 2003, "Circuit superhétérodyne à filtre passe-bande de sélection de canal", dépôt européen N° EP1481484 A1, Andreas Kaiser, Dimitri Galayko, Bernard Legrand, Olivier Billoint, 2002. "Procédé de réglage de l'écartement de deux éléments mécaniques d'une structure micromécanique sensiblement plane et résonateur électromécanique correspondant", dépôt international N° WO2003043189 A2, Dimitri Galayko, Andreas Kaiser, Dominique Collard, 2001 |
